Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformity

Chiappe, DanieleDanieleChiappeLudwig, JonathanJonathanLudwigLeonhardt, AlessandraAlessandraLeonhardtEl Kazzi, SalimSalimEl KazziNalin Mehta, AnkitAnkitNalin MehtaNuytten, ThomasThomasNuyttenCelano, UmbertoUmbertoCelanoSutar, SurajitSurajitSutarPourtois, GeoffreyGeoffreyPourtoisCaymax, MattyMattyCaymaxParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorstLin, DennisDennisLinDe Gendt, StefanStefanDe GendtBarla, KathyKathyBarlaHuyghebaert, CedricCedricHuyghebaertAsselberghs, IngeIngeAsselberghsRadu, IulianaIulianaRadu2021-10-252021-10-2520180957-4484https://imec-publications.be/handle/20.500.12860/30412Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformityJournal articlehttp://iopscience.iop.org/article/10.1088/1361-6528/aad798/pdf