Priyabadini, SwarnakamalSwarnakamalPriyabadiniSterken, TomTomSterkenWang, LiangLiangWangDhaenens, KristofKristofDhaenensVandecasteele, BjornBjornVandecasteeleVan Put, StevenStevenVan PutPetersen, A.E.A.E.PetersenVanfleteren, JanJanVanfleteren2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21335An approach to produce a stack of photo definable polyimide based flat UTCPsProceedings paper