Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapse

Vos, IngridIngridVosHellin, DavidDavidHellinVertommen, JohanJohanVertommenDemand, MarcMarcDemandBoullart, WernerWernerBoullart2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20117Silicon nano-pillar test structures for quantitative evaluation of wafer drying induced pattern collapseProceedings paper