Electrical characterization of the MOS (metal-oxide-semiconductor) system: High mobility substrates

Lin, DennisDennisLinBrammertz, GuyGuyBrammertzSioncke, SonjaSonjaSionckeNyns, LauraLauraNynsAlian, AliRezaAliRezaAlianWang, Wei-EWei-EWangHeyns, MarcMarcHeynsCaymax, MattyMattyCaymaxHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19303Electrical characterization of the MOS (metal-oxide-semiconductor) system: High mobility substratesProceedings paper