Growth and characterization of near-atomically flat, thick homoepitaxial CVD diamond films

Bogdan, G.G.BogdanNesladek, MilosMilosNesladekD'Haen, JanJanD'HaenMaes, J.J.MaesMoshchalkov, V.V.V.V.MoshchalkovHaenen, KenKenHaenenD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10121Growth and characterization of near-atomically flat, thick homoepitaxial CVD diamond filmsJournal article