Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulation

Herfurth, NorbertNorbertHerfurthWu, ChenChenWuBeureuther, A.A.BeureutherNakamura, T.T.NakamuraDe Wolf, IngridIngridDe WolfSimon-Najasek, M.M.Simon-NajasekAltmann, FrankFrankAltmannCroes, KristofKristofCroesBoit, ChristianChristianBoit2021-10-272021-10-2720190026-2714https://imec-publications.be/handle/20.500.12860/33129Non-invasive soft breakdown localisation in low k dielectrics using photon emission microscopy and thermal laser stimulationJournal articlehttps://doi.org/10.1016/j.microrel.2018.11.009