Detalle, MikaelMikaelDetalleKim, JaeminJaeminKimNolmans, PhilipPhilipNolmansSun, XiaoXiaoSunRyckaert, JulienJulienRyckaertLa Manna, AntonioAntonioLa MannaBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20597Fat damascene wires for high bandwidth routing in silicon interposerProceedings paper