On the low-frequency noise of pMOSFETs with embedded SiGe source/drain and fully silicided metal gate

Simoen, EddyEddySimoenVerheyen, PeterPeterVerheyenShickova, AdelinaAdelinaShickovaLoo, RogerRogerLooClaeys, CorCorClaeys2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12911On the low-frequency noise of pMOSFETs with embedded SiGe source/drain and fully silicided metal gateJournal article