Hybrid overlay metrology with CDSEM in a BEOL patterning scheme

Leray, PhilippePhilippeLerayJehoul, ChristianeChristianeJehoulInoue, OsamuOsamuInoueOkagawa, YutakaYutakaOkagawa2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25527Hybrid overlay metrology with CDSEM in a BEOL patterning schemeProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210946