Shrinking solid-state nanopores using electron-beam induced deposition

Kox, RonaldRonaldKoxChen, ChangChangChenMaes, GuidoGuidoMaesLagae, LiesbetLiesbetLagaeBorghs, GustaafGustaafBorghs2021-10-172021-10-1720090957-4484https://imec-publications.be/handle/20.500.12860/15623Shrinking solid-state nanopores using electron-beam induced depositionJournal articlehttp://www.iop.org/EJ/article/0957-4484/20/11/115302/nano9_11_115302.pdf