Zhao, ChaoChaoZhaoBrijs, BertBertBrijsDortu, FabianFabianDortuDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxHeyns, MarcMarcHeynsBesling, W.W.BeslingMaes, JanJanMaes2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8438Application of x-ray fluorescence spectrometry in charaterization of high-k uktra-thin filmsProceedings paper