Stress and mechanical constants characterizations of phase-change SbTe-alloys: influence of the film thickness and substrate

Lisoni, JuditJuditLisoniGille, ThomasThomasGilleGoux, LudovicLudovicGouxDelhougne, RomainRomainDelhougneAttenborough, KarenKarenAttenboroughWouters, DirkDirkWouters2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12498Stress and mechanical constants characterizations of phase-change SbTe-alloys: influence of the film thickness and substrateProceedings paper