New aspects of nanopotentiometry for complementary metal-oxide-semiconductor transistors

Trenkler, ThomasThomasTrenklerStephenson, RobertRobertStephensonJansen, PhilippePhilippeJansenVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4799New aspects of nanopotentiometry for complementary metal-oxide-semiconductor transistorsJournal article