Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line

Subramanian, AnanthAnanthSubramanianNeutens, PieterPieterNeutensDhakal, AshimAshimDhakalJansen, RoelofRoelofJansenClaes, TomTomClaesRottenberg, XavierXavierRottenbergPeyskens, FredericFredericPeyskensSelvaraja, ShankarShankarSelvarajaHelin, PhilippePhilippeHelinDu Bois, BertBertDu BoisLeyssens, KennyKennyLeyssensSeveri, SimoneSimoneSeveriDeshpande, ParuParuDeshpandeBaets, RoelRoelBaetsVan Dorpe, PolPolVan Dorpe2021-10-212021-10-2120131943-0655https://imec-publications.be/handle/20.500.12860/23132Low-loss singlemode PECVD cilicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot lineJournal articlehttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6674990