Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopy

Vandenbroucke, SofieSofieVandenbrouckeLevrau, ElisabethElisabethLevrauMinjauw, MatthiasMatthiasMinjauwVan Daele, MichielMichielVan DaeleSolano, EduardoEduardoSolanoVos, RitaRitaVosDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2021-10-292021-10-2920201463-9076https://imec-publications.be/handle/20.500.12860/36192Study of the surface species during thermal and plasma-enhanced atomic layer deposition of titanium oxide films using in situ IR-spectroscopy and in vacuo X-ray photoelectron spectroscopyJournal article10.1039/d0cp00395f