Mary Joy, RaniRaniMary JoyPobedinskas, PauliusPauliusPobedinskasBaule, NinaNinaBauleBai, ShengyuanShengyuanBaiJannis, DaenDaenJannisGauquelin, NicolasNicolasGauquelinPinault-Thaury, Marie-AmandineMarie-AmandinePinault-ThauryJomard, FrancoisFrancoisJomardSankaran, Kamatchi JothiramalingamKamatchi JothiramalingamSankaranRouzbahani Bayatani, RozitaRozitaRouzbahani BayataniLloret, FernandoFernandoLloretDesta, DereseDereseDestaD'Haen, JanJanD'HaenVerbeeck, JohanJohanVerbeeckBecker, Michael FrankMichael FrankBeckerHaenen, KenKenHaenen2024-02-052023-12-312024-02-0520241359-6454WOS:001126632800001https://imec-publications.be/handle/20.500.12860/43331The effect of microstructure and film composition on the mechanical properties of linear antenna CVD diamond thin filmsJournal article10.1016/j.actamat.2023.119548WOS:001126632800001CHEMICAL-VAPOR-DEPOSITIONLARGE-AREA DEPOSITIONMICROWAVE-PLASMALOW-TEMPERATUREINTRINSIC STRESSRESIDUAL-STRESSYOUNGS MODULUSACOUSTIC-WAVESULTRA-THINLASER