Micro probe carrier profiling of ultra-shallow structures in germanium

Clarysse, TrudoTrudoClarysseMoussa, AlainAlainMoussaParmentier, BrigitteBrigitteParmentierEyben, PierrePierreEybenDouhard, BastienBastienDouhardVandervorst, WilfriedWilfriedVandervorstNielsen, PeterPeterNielsenLin, RongRongLinPetersen, DirchDirchPetersenWang, FeiFeiWangHansen, OleOleHansen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16891Micro probe carrier profiling of ultra-shallow structures in germaniumProceedings paper