Braginsky, O.V.O.V.BraginskyKovalev, A.S.A.S.KovalevLopaev, D.V.D.V.LopaevMalykhin, E.M.E.M.MalykhinMankelevich, Y.A.Y.A.MankelevichProshina, O.V.O.V.ProshinaRakhimova, T.V.T.V.RakhimovaRakhimov, A.T.A.T.RakhimovVoloshin, D.G.D.G.VoloshinVasilieva, A.N.A.N.VasilievaZyryanov, S.M.S.M.ZyryanovSmirnov, EvgenyEvgenySmirnovBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-1920110021-8979https://imec-publications.be/handle/20.500.12860/18620The effect of He plasma treatment on properties of organosilicate glass low-k filmsJournal article