Selective wet etching of Hf-based layers

Snow, JimJimSnowClaes, MartineMartineClaesParaschiv, VasileVasileParaschivKraus, HaraldHaraldKrausEitoku, AtsuroAtsuroEitokuVos, RitaRitaVosMertens, PaulPaulMertensBoullart, WernerWernerBoullartDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9614Selective wet etching of Hf-based layersOral presentation