The increasing importance of the use of ozone in the microelectronics industry

De Smedt, F.F.De SmedtDe Gendt, StefanStefanDe GendtClaes, MartineMartineClaesHeyns, MarcMarcHeynsVankerckhoven, H.H.VankerckhovenVinckier, ChrisChrisVinckier2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6213The increasing importance of the use of ozone in the microelectronics industryJournal article