Issues and solutions for co-integration of Ge and IIIV MOSFETs for beyond 22 nm technology generation CMOS

Caymax, MattyMattyCaymax2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16834Issues and solutions for co-integration of Ge and IIIV MOSFETs for beyond 22 nm technology generation CMOSOral presentation