Schrauwen, JonathanJonathanSchrauwenRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14446Focused-ion-beam lithogtaphy for prototyping of silicon photonic componentsOral presentation