De Schepper, PeterPeterDe SchepperVaglio Pret, AlessandroAlessandroVaglio PretHansen, TerjeTerjeHansenGiglia, AngeloAngeloGigliaHoshiko, KenjiKenjiHoshikoMani, AntonioAntonioManiBiafore, John J.John J.Biafore2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25153XAS photoresists electron/quantum yields study with synchrotron lightProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2211082