Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniques

Stoffels, SteveSteveStoffelsBoedecker, SebastianSebastianBoedeckerPuers, BobBobPuersDe Wolf, IngridIngridDe WolfTilmans, HarrieHarrieTilmansRembe, ChristianChristianRembe2021-10-182021-10-182009-06https://imec-publications.be/handle/20.500.12860/16273Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniquesProceedings paper