Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogen

Houssa, MichelMichelHoussaAfanas'ev, V. V.V. V.Afanas'evStesmans, AndreAndreStesmansHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5347Defect generation in Si/Sio2/Zro2/Tin structures: the possible role of hydrogenJournal article