Wilk, G.D.G.D.WilkFrank, M.M.FrankHo, M.Y.M.Y.HoGreen, MartinMartinGreenChabal, Y.J.Y.J.ChabalRaisanen, P.P.RaisanenBrijs, BertBertBrijsSorsch, T.W.T.W.Sorsch2021-10-152021-10-152002https://imec-publications.be/handle/20.500.12860/7055Initial growth kinetics of ALD Al2O3 and HfO2 and post-annealing effectsOral presentation