Simulations and measurements of capacitance in dielectric stacks and consequences for integration

De Roest, DavidDavidDe RoestDonaton, R. A.R. A.DonatonStucchi, MicheleMicheleStucchiMaex, KarenKarenMaexNauwelaers, BartBartNauwelaers2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5202Simulations and measurements of capacitance in dielectric stacks and consequences for integrationJournal article