Cuduvally, RamyaRamyaCuduvallyMorris, RichardRichardMorrisFerrari, PieroPieroFerrariBogdanowicz, JanuszJanuszBogdanowiczFleischmann, ClaudiaClaudiaFleischmannMelkonyan, DavitDavitMelkonyanVandervorst, WilfriedWilfriedVandervorst2021-10-282021-10-2820200304-3991https://imec-publications.be/handle/20.500.12860/34944Potential sources of compositional inaccuracy in the atom probe tomography of InxGa1-xAsJournal articlehttps://doi.org/10.1016/j.ultramic.2019.112918