Nitride engineering for improved erase performance and retention of TANOS NAND Flash memory

Van den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemontZahid, MohammedMohammedZahidDegraeve, RobinRobinDegraeveBreuil, LaurentLaurentBreuilCacciato, AntonioAntonioCacciatoRothschild, AudeAudeRothschildOlsen, ChrisChrisOlsenGanguly, UdayanUdayanGangulyVan Houdt, JanJanVan Houdt2021-10-172021-10-172008-05https://imec-publications.be/handle/20.500.12860/14625Nitride engineering for improved erase performance and retention of TANOS NAND Flash memoryProceedings paper