Komori, KanaKanaKomoriWostyn, KurtKurtWostynRondas, DirkDirkRondasLoyo Prado, JanaJanaLoyo PradoConard, ThierryThierryConardLoo, RogerRogerLooRagnarsson, Lars-AkeLars-AkeRagnarssonHoriguchi, NaotoNaotoHoriguchiHolsteyns, FrankFrankHolsteyns2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28700Study of SiGe cleaningProceedings paper10.1149/08002.0141ecst