Marinov, DaniilDaniilMarinovde Marneffe, Jean-FrancoisJean-Francoisde MarneffeSmets, QuentinQuentinSmetsArutchelvan, GouthamGouthamArutchelvanBal, Kristof M.Kristof M.BalVoronina, EkaterinaEkaterinaVoroninaRakhimova, TatyanaTatyanaRakhimovaMankelevich, YuriYuriMankelevichEl Kazzi, SalimSalimEl KazziNalin Mehta, AnkitAnkitNalin MehtaWyndaele, Pieter-JanPieter-JanWyndaeleHeyne, Markus HartmutMarkus HartmutHeyneZhang, JianranJianranZhangWith, Patrick C.Patrick C.WithBanerjee, SreetamaSreetamaBanerjeeNeyts, Erik C.Erik C.NeytsAsselberghs, IngeIngeAsselberghsLin, DennisDennisLinDe Gendt, StefanStefanDe Gendt2022-02-222022-02-2220212397-7132WOS:000613258900001https://imec-publications.be/handle/20.500.12860/39014Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayersJournal article10.1038/s41699-020-00197-7WOS:000613258900001IRREVERSIBLE ADSORPTIONDENSITYMOS2PHOTOLUMINESCENCEPOLYMERSGRAPHENESILICONFILMS