Hikavyy, AndriyAndriyHikavyyRooyackers, RitaRitaRooyackersVerheyen, PeterPeterVerheyenVellianitis, GeorgiosGeorgiosVellianitisVan Dal, MarkMarkVan DalLander, RobRobLanderLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13881Application of HCl etch in the production of novel devicesMeeting abstract