El-Kazzi, MarioMarioEl-KazziGrenet, GenevieveGenevieveGrenetMerckling, ClementClementMercklingSaint-Girons, GuillaumeGuillaumeSaint-GironsBotella, ClaudeClaudeBotellaMarty, OlivierOlivierMartyHollinger, GuyGuyHollinger2021-10-172021-10-1720091098-0121https://imec-publications.be/handle/20.500.12860/15271X-ray photoelectron diffraction study of thin Al2O3 films grown on Si(111) by molecular beam epitaxyJournal article