Experimental studies of dose retention and activation in FinFet-based structures

Mody, JayJayModyDuffy, RayRayDuffyEyben, PierrePierreEybenGoossens, JozefienJozefienGoossensMoussa, AlainAlainMoussaPolspoel, WouterWouterPolspoelBerghmans, BartBartBerghmansVan Dal, MarkMarkVan DalPawlak, BartekBartekPawlakKaiser, MonjaMonjaKaiserWeemaes, RobbertRobbertWeemaesVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15879Experimental studies of dose retention and activation in FinFet-based structuresProceedings paper