Demonstration of a submicron damascene Cu/low-k mechanical sensor to monitor stress in BEOL metallisation

Wilson, ChrisChrisWilsonCroes, KristofKristofCroesTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerHorsfall, HorsfallHorsfallHorsfallO'Neill, Anthony G.Anthony G.O'Neill2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16543Demonstration of a submicron damascene Cu/low-k mechanical sensor to monitor stress in BEOL metallisationProceedings paper