Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixtures

Rakhimova, TatyanaTatyanaRakhimovaBraginsky, OLEGOLEGBraginskyKlopovskiy, KonstantinKonstantinKlopovskiyKovalev, AlexanderAlexanderKovalevLopaev, DmitryDmitryLopaevProshina, OlgaOlgaProshinaRakhimov, AlexanderAlexanderRakhimovShamiryan, DenisDenisShamiryanVasilieva, AnnaAnnaVasilievaVoloshin, DmitryDmitryVoloshin2021-10-182021-10-1820090093-3813https://imec-publications.be/handle/20.500.12860/16087Experimental and theoretical studies of radical production in RF CCP discharge at 81-MHz frequency in Ar/CF4 and Ar/CHF3 mixturesJournal article