Enhanced detection of NO2 with recessed AlGaN/GaN open gate structures

Vitushinsky, RomanRomanVitushinskyCrego Calama, MercedesMercedesCrego CalamaBrongersma, SywertSywertBrongersmaOffermans, PeterPeterOffermans2021-10-212021-10-2120130003-6951https://imec-publications.be/handle/20.500.12860/23361Enhanced detection of NO2 with recessed AlGaN/GaN open gate structuresJournal articlehttp://scitation.aip.org/content/aip/journal/apl/102/17/10.1063/1.4803001