Analysis and characterization of a mechanical sensor to monitor stress in interconnect features

Wilson, ChrisChrisWilsonCroes, KristofKristofCroesTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyerGallacher, BarryBarryGallacherBull, SteveSteveBullHorsfall, AltonAltonHorsfallO'Neill, AnthonyAnthonyO'Neill2021-10-192021-10-1920100040-6090https://imec-publications.be/handle/20.500.12860/18356Analysis and characterization of a mechanical sensor to monitor stress in interconnect featuresJournal article