Verhaegen, KatarinaKatarinaVerhaegenBaert, KrisKrisBaertSansen, WillyWillySansenHermans, LouLouHermansMertens, RobertRobertMertens2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2286The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranesProceedings paper