Maex, KarenKarenMaexHoward, DaveDaveHowardDe Wolf, IngridIngridDe WolfSteegen, AnAnSteegen2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2008TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologiesProceedings paper