Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologies

Lauwers, A.A.LauwersSteegen, AnAnSteegende Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsaySatta, AlessandraAlessandraSattaBender, HugoHugoBenderMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5439Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13μm technologiesJournal article