Hafnium oxide based CMOS compatible ferroelectric materials

Schroeder, UweUweSchroederMartin, D.D.MartinMueller, J.J.MuellerYurchuk, E.E.YurchukMueller, S.S.MuellerAdelmann, ChristophChristophAdelmannSchloesser, T.T.Schloesservan Bentum, R.R.van BentumMikolajick, ThomasThomasMikolajick2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21479Hafnium oxide based CMOS compatible ferroelectric materialsProceedings paperhttp://ecst.ecsdl.org/content/50/4/15.abstract?sid=ae6626b4-0c76-404e-8927-e76443887628