Two-dimensional carrier profiling with Scanning Capacitance Microscopy, industry-ready innovative research

Duhayon, NatasjaNatasjaDuhayonVandervorst, WilfriedWilfriedVandervorstHellemans, L.L.Hellemans2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7538Two-dimensional carrier profiling with Scanning Capacitance Microscopy, industry-ready innovative researchProceedings paper