Detalle, MikaelMikaelDetalleRoda Neve, CesarCesarRoda NeveNolmans, PhilipPhilipNolmansMiller, AndyAndyMillerLa Manna, AntonioAntonioLa MannaVan der Plas, GeertGeertVan der PlasBeyer, GeraldGeraldBeyerBeyne, EricEricBeyne2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25196Decoupling capacitor integration in passive silicon interposerMeeting abstractwww.prc.gatech.edu/git