RF-Power: driver for electrostatic RF-MEMS devices

Rottenberg, XavierXavierRottenbergBrebels, StevenStevenBrebelsNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-152021-10-152004-09https://imec-publications.be/handle/20.500.12860/9530RF-Power: driver for electrostatic RF-MEMS devicesJournal article