Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithography

Roelkens, GuntherGuntherRoelkensDumon, PieterPieterDumonBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162005-12https://imec-publications.be/handle/20.500.12860/11113Efficient silicon-on-insulator fiber coupler fabricated using 248-nm-deep UV lithographyJournal article