Diode assessment of material characteristics in internally gettered and non-gettered Czochralski silicon: problems, pitfalls and guidelines

Simoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiClaeys, CorCorClaeysCzerwinski, A.A.CzerwinskiGaubas, EugenijusEugenijusGaubas2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2953Diode assessment of material characteristics in internally gettered and non-gettered Czochralski silicon: problems, pitfalls and guidelinesProceedings paper