Sedky, SherifSherifSedkyFiorini, PaoloPaoloFioriniCaymax, MattyMattyCaymaxVerbist, AgnesAgnesVerbistBaert, KrisKrisBaertHermans, LouLouHermans2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2127IR micro bolometers, made of polycrystalline silicon germanium alloysProceedings paper