Gallagher, EmilyEmilyGallagherRagnarsson, Lars-AkeLars-AkeRagnarssonRolin, CedricCedricRolin2025-02-042024-12-032025-02-0420240894-6507WOS:001363164100021https://imec-publications.be/handle/20.500.12860/44907Sustainable Semiconductor Manufacturing: The Role of LithographyJournal article10.1109/TSM.2024.3416830WOS:001363164100021