Gu, XinyuXinyuGuCho, YounjinYounjinChoKawakami, TakanoriTakanoriKawakamiHagiwara, YujiYujiHagiwaraRawlings, BrandonBrandonRawlingsMesch, RyanRyanMeschOgata, ToshiyukiToshiyukiOgataKim, TaehoTaehoKimSeshimo, TakehiroTakehiroSeshimoWang, WadeWadeWangSundaresan, Arun K.Arun K.SundaresanTurro, Nicholas J.Nicholas J.TurroGronheid, RoelRoelGronheidBlackwell, James M.James M.BlackwellBristol, RobertRobertBristolWilson, C. GrantC. GrantWilson2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19018Photobase generator enabled pitch division: a progress reportProceedings paper